@Article{MirandaUedBalBelFer:2010:TrNaDi,
author = "Miranda, Claudia Renata Borges and Ueda, Mario and Baldan,
Mauricio Ribeiro and Beloto, Antonio Fernando and Ferreira,
Neidenei Gomes",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de
Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas
Espaciais (INPE)} and {Instituto Nacional de Pesquisas Espaciais
(INPE)}",
title = "Treatment of nanocrystalline diamond films by nitrogen
implantation using PIII processing",
journal = "Surface and Coatings Technology",
year = "2010",
volume = "204",
number = "18-19",
pages = "3034--3038",
month = "June",
note = "The Tenth International Workshop on Plasma-Based Ion Implantation
and Deposition, S{\~a}o Jos{\'e} dos Campos, SP, Brazil and
{07-11 September 2009 Edited by Joaquim J. Barroso and Mario
Ueda}",
keywords = "Ion implantation technology, Diamond, Electrochemical
properties.",
abstract = "The influence of N2 Plasma Immersion Ion Implantation (PIII) on
undoped nanocrystalline diamond (NCD) films grown on silicon
substrate by CVD process using a hot filament reactor was
systematically studied. Before and after the implantation, NCD
films were investigated using scanning electron microscopy (SEM),
high resolution X-ray diffraction (HRXRD) and Raman scattering
spectroscopy. Significant changes in the film surface morphologies
due to the plasma implantation treatment were observed. The NCD
morphology changed from cauliflower-like to a smoother surface
after the nitrogen-plasma immersion. The Raman spectra are similar
for the three kind of electrodes before and after PIII of 15 and
30 min. Although a small difference among the ratios concerning
the D and G Raman band intensities (ID/IG) may be observed that
seems to increase after the plasma treatment, associated to the
disorder increase caused by nitrogen incorporation in the sp2
phase. Electrochemical response also showed that implanted NCD
films had their electrical conductivity improved while the
electron transfer kinetics decreased for such NCD films after 15
and 30 min of N2 implantation.",
doi = "10.1016/j.surfcoat.2010.02.051",
url = "http://dx.doi.org/10.1016/j.surfcoat.2010.02.051",
issn = "0257-8972",
label = "lattes: 3374288398505199 1 MirandaUedBalBelFer:2010:TrNaDi",
language = "en",
targetfile = "miranda.pdf",
urlaccessdate = "02 maio 2024"
}